High-throughput Experiment Driven Development of Next Generation Semiconductor Interconnects
Sungkyunkwan University & Samsung Electronics
02.2023 - Current
Collaborated with the Samsung R&D team to develop Cu-based next-generation interconnect alloys, including Co and Ru alloys.
Conducted high-throughput experiments to deposit thin film alloys on silicon wafers using sputtering (PVD), and used XRD, TEM, and a 4-point probe for evaluating properties such as resistivity and electromigration resistance.
Investigated the alloying effects on grain boundary diffusion and enhanced electromigration resistance, contributing to the identification of alloys with lower resistance for advanced semiconductor devices.
Discovered specific Co-based alloy compositions that simultaneously achieved lower electrical resistivity and superior electromigration resistance compared to pure Cu and Co.
Machine Learning Analysis of High-k Metal Gate Semiconductor Process
Sungkyunkwan University & Samsung Electronics
02.2023 - Current
Published a first-author research paper on optimization of high-k metal gate peripheral transistor processes. (doi.org/10.1063/5.0191100)
Engineered advanced HfSiON-based high-k/metal gate stacks with optimized interlayer nitridation and metal work-function tuning to enhance DRAM transistor performance.
Conducted material-level optimization of high-k/metal gate stacks, including interlayer nitridation and HfSiON integration, achieving improved reliability and reduced leakage in DRAM devices.
Developed and optimized deposition/nitridation processes for high-k/metal gate stacks (HfSiON, TiN/Al) to address interface trap density and threshold voltage stability in advanced DRAM transistors.
Implemented AI analysis techniques including anomaly detection, inverse design, and explainable AI (XAI) for device process optimization through MES.
Education
Master of Mechanical Engineering -
Sungkyunkwan University
02.2025
Bachelor of Material Science and Engineering - undefined
University of Seoul
02.2023
Skills
PVD (Magnetron sputter), XRD, XPS, TEM (prepared thin film lamella samples using FIB for microstructural analysis) based thin film alloy characterization skills
Semiconductor analysis equipment (4-point probe, thin film cleaving test) setup and operation skills
Machine learning based semiconductor process analysis skills
Language: English (Advanced), Korean (Native)
Computer: Python (Pytorch, Tensorflow), Minitab, Matlab, LabView, Excel, MS Word, PowerPoint
Certification
OPIc English: Intermediate High (2C3038529497, 2024-08-21)
EXTRA-CURRICULAR ACTIVITIES
Member, Soccer Club Present Dongcheon-dong Early Morning Soccer Club | Nov 2019 – Present Actively playing as a midfielder in a local soccer club.
OTHERS
Date of Birth: July 28th, 1996
Address: 102-dong 808-ho, 12, Pangyo Daejang-ro 2-gil, Bundang-gu, Seongnam-si, Gyeonggi-do, Republic of Korea
Military Service: Discharged from Korea Army (2017-10 - 2019-06)
https://www.dleelab.org/
Labatory
Timeline
High-throughput Experiment Driven Development of Next Generation Semiconductor Interconnects
Sungkyunkwan University & Samsung Electronics
02.2023 - Current
Machine Learning Analysis of High-k Metal Gate Semiconductor Process
Sungkyunkwan University & Samsung Electronics
02.2023 - Current
Bachelor of Material Science and Engineering - undefined
Nurse, Surgical Intensive Care Unit at Sungkyunkwan University Samsung Changwon HospitalNurse, Surgical Intensive Care Unit at Sungkyunkwan University Samsung Changwon Hospital
Clinical Research Coordinator (CRC) at BUNDANG SEOUL NATIONAL UNIVERSITY HOSPITALClinical Research Coordinator (CRC) at BUNDANG SEOUL NATIONAL UNIVERSITY HOSPITAL