Experienced FAE with expertise in FIB-SEM imaging, lithography process optimization, and semiconductor defect analysis. Adept at customizing process recipes for different chips, optimizing imaging & focus alignment, and improving yield through data-driven analysis. Developed semiconductor processes utilizing ASML DUV Stepper and Nikon Stepper for lithography applications to enhance patterning precision and process stability. Proficient in Excel for data analysis and process optimization. Strong communication and technical support skills, with a proven track record of working with Samsung, SK Hynix, and global teams to enhance semiconductor manufacturing efficiency.
- Conducted FIB-SEM and 300mm FIB-SEM process optimization, improving imaging resolution by 20% and reducing analysis time by 30%.
- Developed customized recipes for semiconductor manufacturers (Samsung, SK Hynix), leading to a 25% increase in process stability.
- Provided technical support and troubleshooting, resolving imaging & focus alignment issues and reducing defect rates by 15%.
- Analyzed process data using Excel (pivot tables, SPC, data visualization), detecting error trends and reducing failure rates by 20%.
- Assisted in utilizing AI-based image processing tools for defect detection and process optimization, contributing to a 15% improvement in automated analysis accuracy.
- Collaborated with global teams to enhance equipment performance and automation recipes, decreasing turnaround time (TAT) by 40%.
- Optimized FIB CVD and etching processes, achieving ±5% uniformity in material deposition and improving defect reduction by 30%.
- Developed Cu RDL (Redistribution Layer) process using Nikon Stepper, optimizing exposure dose and focus to achieve ±3% CD uniformity.
- Conducted ASML DUV Stepper-based Hybrid Cu Bonding process development, securing Cu pitch size margin by 35%.
- Optimized wet etching parameters for Cu RDL process, reducing undercut defects by 28% and ensuring target CD dimensions.
- Utilized plasma treatment to enhance CCL warpage reduction and adhesion, improving process stability by 22%.
- Analyzed FIB & V-SEM cross-sections to evaluate etching rate trends and secure reproducibility in Cu RDL fabrication.
- Contributed to Cu CMP process optimization, minimizing dishing and erosion effects and ensuring uniform planarization, reducing dishing by 30%.
- Collaborated with internal teams and external partners to enhance hybrid Cu bonding reliability and advanced packaging process development.
- Developed coordinate system wafers using photolithography, achieving a minimum linewidth of 4μm with 97% pattern clarity.
- Designed custom photomasks for wafer fabrication, optimizing exposure and etching conditions to improve process yield by 60×.
- Conducted 2D material exfoliation on wafers, increasing exfoliation success rate by 40% for semiconductor device fabrication.
- Optimized PR coating and SiO2 etching processes, reducing process defects by 35% and improving resolution consistency.
- Performed FIB and SEM cross-sectional analysis, ensuring etching depth accuracy within ±2% deviation.
- Utilized data visualization techniques to analyze process trends and optimize etching recipes, reducing development time by 30%.
- Assisted in high-temperature wafer processing, resolving process instability issues and enabling a 50% increase in research output, contributing to a successful publication.
- Electrical engineer (2022. 09 Acquired)
- Driver's license (2016. 09 Acquired)
- TOEIC Speaking – IM3(130) (2024. 07 Acquired)
A conference presentation
ISMP - Development of 8-inch barrier CMP process for Cu hybrid bonding
KCS -
The study of the erosion and dishing shape in the Cu CMP process for 3D hybrid bonding
The study of the effects of Cu-density and pad size in the CMP process for 3D hybrid bonding